UNICORN-600 Series

★Received Equipment Quality Award from TSMC in 2014★

◎ Features:

  • Applicable to Mask Inspections for 45 nm – 7 nm nodes.

  • Pin-Hole inspection.

  • Particle inspection for Inner Frame and Pellicle Side.

  • Uses dedicated algorithm to analyze Particle on / under Pellicle.

  • High-precision defect location inspection.

◎ Application

  • OQC at Mask Shops.

  • For Pellicle Manufacturers.