UNICORN-620 Series

UNICORN-620 Series
★Received 1st​ place in Quality Award from TSMC in 2016★

◎ Features:

  • Applicable to Mask Inspections for 28 nm – 5 nm nodes.

  • SMIF POD does not have to be turned on when inspecting, so there are no secondary pollution concerns.

  • Real time dust monitoring for Blank / ADI / AEI process at Mask Shop.

  • Real time dust monitoring on the Backside / Blank of EUV Mask.

  • High-precision defect location inspection.

◎ Application:

  • Processing inspections at Mask Shops.

  • For Mask Blank Manufacturers.