UNICORN-640 Series ★Received Equipment Quality Award from TSMC in 2014★ ◎ Features:Applicable to Mask Inspections for 45 nm – 7 nm nodes.Pin-Hole inspection.Particle inspection for Inner Frame and Pellicle Side.Uses dedicated algorithm to analyze Particle on / under Pellicle.High-precision defect location inspection.◎ Application:OQC at Mask Shops.For Pellicle Manufacturers.