UNICORN-660 Series

◎ Features:

  • Applicable to Mask inspections for 45 nm – 16 nm nodes.

  • Instant defect inspection on the surface of Pellicle and the Backside of Mask.

  • Compatible with OHT to carry out fully automatic mask inspections.

  • High-precision defect location inspection.

◎ Application:

  • IQC Inspection at Foundries.

  • Routine Inspection at Foundries.

  • For Pellicle Manufacturers.