UNICORN-660 Series ◎ Features: Applicable to Mask inspections for 45 nm – 16 nm nodes. Instant defect inspection on the surface of Pellicle and the Backside of Mask. Compatible with OHT to carry out fully automatic mask inspections. High-precision defect location inspection. ◎ Application: IQC Inspection at Foundries. Routine Inspection at Foundries. For Pellicle Manufacturers.