UNICORN-660 Series
◎ Features：
-
Applicable to Mask inspections for 45 nm – 16 nm nodes.
-
Instant defect inspection on the surface of Pellicle and the Backside of Mask.
-
Compatible with OHT to carry out fully automatic mask inspections.
-
High-precision defect location inspection.
◎ Application：
-
IQC Inspection at Foundries.
-
Routine Inspection at Foundries.
-
For Pellicle Manufacturers.
