UNICORN-660 Series

◎ Features:

  • Applicable to Mask inspections for 45 nm – 16 nm nodes.
  • Instant defect inspection on the surface of Pellicle and the Backside of Mask.
  • Compatible with OHT to carry out fully automatic mask inspections.
  • High-precision defect location inspection.

◎ Application:

  • IQC Inspection at Foundries.
  • Routine Inspection at Foundries.
  • For Pellicle Manufacturers.