UNICORN-840 Series

★Received Equipment Quality Award from TSMC in 2014★

◎ Benefits:

  • Increase KLA equipment uptime and reduce installation costs.
  • Use data to identify dust particles, replacing manual inspections.

◎ Application

  • Mask inspection for advanced semiconductor components in 45-7 nm processes.
  • OQC in Mask Shop.
  • Pellicle Manufacturer.