UNICORN-840E Pro Series

◎ Benefits:

  • Increase KLA equipment uptime and reduce installation costs.
  • Use data to identify dust particles, replacing manual inspections.

◎ Application:

  • EUV mask inspection for advanced semiconductor components in 7-3 nm processes.
  • OQC in Mask Shop.
  • IQCs/ regular inspections/ inspections before light exposure in foundries.