UNICORN-820 Series

UNICORN-620 Series
★Received 1st​ place in Quality Award from TSMC in 2016★

◎ Benefits:

  • Increase product yield by identifying processes where dust particles occurred through data.
  • Increase product yield by testing the cleanliness level of new equipment before commissioning equipment.

◎ Application:

  • Mask inspection for advanced semiconductor components in 28-5 nm processes.
  • Monitoring all mask process stations in Mask Shop.