UNICORN-820 Series
★Received 1st place in Quality Award from TSMC in 2016★
◎ Benefits：
Increase product yield by identifying processes where dust particles occurred through data.
Increase product yield by testing the cleanliness level of new equipment before commissioning equipment.
◎ Application：
Mask inspection for advanced semiconductor components in 28-5 nm processes.
Monitoring all mask process stations in Mask Shop.
